X-ray Microscopy

Version 10.1 by longoe on 2019/11/14 14:25
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  • Imaging by diffractive optics: Fresnel Zone Plate (FZP) + beamshaping optics. Outermost zone width 50 nm.
  • Available imaging modes: Absorption-contrast and Zernike phase-contrast.
  • Sample preparation by FIB/SEM allows imaging samples with a diameter 8-80 μm.
  • Region of interest tomography (ROI) in Zernike microscopy available  for samples with a diameter up to 2 mm.

Key parameters

Field of view (µm)

Spatial resolution (nm)

Eff. pix size (nm)

Scan time (min)

Fast scan (min) 

50 x 50

50

15nm - 25nm

15 - 30

< 3

85 x 85

100

 35nm

15 - 30

< 3