X-ray Microscopy

Version 7.1 by longoe on 2019/11/14 14:11
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  • FZP + beamshaping optics
  • Absorption and Zernike available
  • Region of interest tomography (ROI) in Zernike 

Key parameters

Resolution (nm)

Field of view (µm)

eff. Pix size (nm)

scan time (min)

fast scan (min) 

50

50

15nm - 25nm

15 - 30

< 3

100

85

 35nm

15 - 30

< 3