X-ray Microscopy

Version 3.1 by greving on 2019/11/14 13:21
It's highly recommended to not edit this document. Any modification made will eventually be lost because it cannot reach back the owner replication instance of that document.
  • FZP + beamshaping optics
  • Absorption and Zernike available
  • Region of interest tomography (ROI) in Zernike 

Resolution

Field of view

eff. Pix size

scan time

fast scan 

50nm

50um

15nm - 35nm

15 - 30min

<03min