X-ray Microscopy
Version 4.1 by greving on 2019-11-14 13:23
- FZP + beamshaping optics
- Absorption and Zernike available
- Region of interest tomography (ROI) in Zernike
Resolution | Field of view | eff. Pix size | scan time | fast scan |
|---|---|---|---|---|
50nm | 50um | 15nm - 25nm | 15 - 30min | < 3min |
100nm | 85um | 35nm | 15 - 30min | < 3min |