X-ray Microscopy

Version 4.1 by greving on 2019/11/14 13:23
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  • FZP + beamshaping optics
  • Absorption and Zernike available
  • Region of interest tomography (ROI) in Zernike 

Resolution

Field of view

eff. Pix size

scan time

fast scan 

50nm

50um

15nm - 25nm

15 - 30min

< 3min 

 100nm

85um 

 35nm

 15 - 30min

< 3min