X-ray Microscopy
Version 6.1 by longoe on 2019-11-14 14:07
- FZP + beamshaping optics
- Absorption and Zernike available
- Region of interest tomography (ROI) in Zernike
Key parameters
Resolution (nm) | Field of view (µm) | eff. Pix size (nm) | scan time (min) | fast scan (min) |
|---|---|---|---|---|
50 | 50 | 15nm - 25nm | 15 - 30 | < 3 |
100 | 85 | 35nm | 15 - 30 | < 3 |